Technical Notes
10- "Cathodes-Neutralizers for Ion Sources. Part 2. Hollow Cathodes."
This article is continuation about cathodes-neutralizers
and, in particular, about the Hollow
Cathodes that are the most reliable
and long
living providers of low and very high
electron
emission for ion beams. There is presented
general information about Hollow cathodes
physics, various designs
and, especially, about frequently used
industrial Hollow Cathodes produced
by several
US companies
and Universities.
Cathodes P2.pdf
11- "Cathodes-Neutralizers for Ion Sources. Part 3. Plasma Bridge, RF and Other Neutralization Methods."
This article about various types of cathodes neutralizers that did not find broad utilization, but have certain rights to be implemented depending on any particular thin film tasks. Some methods are quite unusual and need further development and investigations.
12- "Operation of Industrial Ion Sources with Reactive Gases."
This article is about one of the most difficult problem in operation of industrial ion sources with reactive gases, especially with Oxygen, Nitrogen. Reactive gases actively participate in ion source operation and contaminate anode and discharge channel with oxides, nitrides, etc and make such operations difficult, problematic. There are discussed various explanations of problems with reactive gases, what to do, how to avoid contamination and continue long depositions.
13- "Broad Beam Ion Sources for Industry. Part 1. Introduction. Closed Drift and End-Hall Ion Sources."
This article is a review about cylindrical
industrial ion sources: Closed Drift
and
various end-Hall type.
Zhurin _Part_1_Nov_2010_VTC.pdf
14- "Broad Beam Ion Sources for Industry. Part 2. Recent End-Hall Designs."
This article is a review of end-Hall ion sources that have been developed recently, some of them with quite a narrow ion beam energy distribution.Zhurin_Part2_Dec_2010.pdf
15- "Design of Small Closed Drift Thrusters."
This article is about design of small thruster-ion source of a Closed Drift type with a positive magnetic gradient that makes possible to have a small diameter discharge channel (mean diameter is about 20 mm) and allows operation with high efficiency and without much of oscillations.Design of Small Closed Drift Thrusters-Zhurin, Bugrova et al-pdf.pdf
16- "End-Hall with Reduced Heat to Magnet."
This article is about utilization of an iron
cylinder on top of a magnet for reducing
a heat flow to a rare Earth magnet. Such placement makes possible to vary magnetic
field in end-Hall ion source.
End-Hall with Reduced Heat to Magnet
with
Choi-10_370.pdf
17- "Hall-Current Ion Sources."
This is a review of various existing end-Hall
ion sources utilized by various producers
for industry of thin film depositions.
Hall-Current Ion Sources-Techcon.pdf
18- "Magnetron as source of electrons for end-Hall."
This article is about unusual approach in
neutralization of end-Hall ion source
ion
beam, when instead of a Hot Filament
of a
Hollow Cathode the electrons coming
out of
magnetron are utilized. In such a case, one can have an adequate
ion beam neutralization without limit
on
a source of electrons lifetime.
Magnetron as source of electrons for
end-Hall-03_0442.pdf
19- "Substrate heating with end-Hall various configurations."
This article is about practical utilization
of varieties of end-Hall parts arrangements
(radiation and fluid cooled anode,
front
flange, vacuum chamber walls, with
Hot Filament,
Hollow Cathode, etc). It shows that main source of a substrate
heating is ion beam.
Substrate heating with end-Hall various configurations-2005.pdf
20- "Physics of Closed Drift Thrusters."
This is a review of physics and practical
applications of Closed Drift Thrusters
–
Ion Sources. It shows certain unusual
features
leading for optimum operation of Closed
Drift
Sources.
Zhurin Physics of Closed Drift Thrusters
1999.pdf
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